Accurate Linewidth Measurements on Integrated-circuit Photomasks

Accurate Linewidth Measurements on Integrated-circuit Photomasks

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However, this line-scale calibration can neither reveal the presence of, nor compensate for, any broadening or narrowing of the line image due to such effects as object size, lens aberrations, and degree of illumination coherence. To detectanbsp;...


Title:Accurate Linewidth Measurements on Integrated-circuit Photomasks
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Publisher: - 1980
ISBN-13:

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